Detection apparatus and detecting method, droplet discharge apparatus and droplet discharge method, device and electronic equipment

ABSTRACT

A detection apparatus includes a light emitter for emitting a detection light, a receiver for receiving the detection light, and a moving device for moving a discharge head in a direction to intersect the optical path of the detection light. When D is the diameter of a beam of the detection light, d is the diameter of the droplets, L is the distance between the discharge nozzles in the direction of movement of the discharge head, and H is the relative distance that the discharge head moves from when a discharge nozzle discharges one droplet to when the discharge nozzle discharges the next droplet, settings are adjusted so as to satisfy the conditions: D/2+d/2≦L, and H≦D.

BACKGROUND OF THE INVENTION

[0001] 1. Field of the Invention

[0002] The present invention relates to a detection apparatus and adetection method for a droplet discharge apparatus provided with adischarge head having a discharge nozzle capable of dischargingdroplets, and a droplet discharge apparatus.

[0003] Priority is claimed to Japanese Patent Applications No.2002-312578, filed Oct. 28, 2002, and No. 2003-297878, filed Aug. 21,2003, which are incorporated herein by reference.

[0004] 2. Description of Related Art

[0005] Heretofore, photolithographic methods are used, primarily, formanufacturing devices with fine patterns. However, in recent years,attention has been given to a device manufacturing method using adroplet discharge system. In this technique, liquid material containingfunctional material is discharged from a discharge head in a dropletdischarge apparatus, placing the material on a substrate in order toform a pattern, and it is very effective from the standpoint of handlingdiversified small-quantity production. For a droplet discharge system ina droplet discharge apparatus, generally known systems are a piezo jetsystem in which a droplet of liquid material is discharged by thedistortion of a piezoelectric element, or a method in which liquidmaterial is discharged by the rapid generation of steam due to theapplication of heat.

[0006] A discharge head has a plurality of discharge nozzles. However,sometimes liquid material cannot be discharged from some of thedischarge nozzles because of clogging, or the like, for example. Ifthere is a discharge nozzle (non-performing nozzle) that cannotdischarge droplet, then dots will be missing when a dot pattern isformed by discharging droplets onto a substrate. Japanese PatentApplication Laid-Open, No. 11-78051 discloses a technique regarding amethod of detecting missing dots (non-performing nozzle detectionmethod) in relation to a printer (printing device). In this technique,an ink droplet is discharged from an ink nozzle such that it passesthrough the detection region of a photo sensor, and it is determinedwhether the ink droplet is discharged from the ink nozzle based on adrop in the amount of light received by the photo sensor.

[0007] The above-described conventional art is effective because it candetect accurately whether an ink droplet is discharged from an inknozzle or not, without improving sensor sensitivity, by adjusting theamount of ink discharged in droplets per unit time, or the dischargeinterval. However, in a case where only the discharge amount isincreased or the discharge interval is shortened, there is a possibilitythat detection of ink droplets cannot be performed accurately by a photosensor.

[0008] The present invention takes such conditions into consideration,with an object of providing a detection apparatus and a detecting methodfor a droplet discharge apparatus that can perform accurate detectionwhen detecting whether a droplet is discharged from a discharge nozzleof the droplet discharge apparatus, and a droplet discharge apparatus.

SUMMARY OF THE INVENTION

[0009] A first aspect of the present invention is a detection apparatusfor detecting a droplet discharged from a discharge nozzle provided in adischarge head, has a light emitter for emitting a detection light, areceiver for receiving said detection light, and a moving device formoving said discharge head in a direction to intersect the optical pathof said detection light, said moving device moving said discharge headin said direction of movement, said discharge nozzle discharging saiddroplets at a predetermined time interval, and when D is the diameter ofa beam of said detection light, d is the diameter of said droplets, L isthe distance between the discharge nozzles in the direction of movementof said discharge head, and H is the relative distance that saiddischarge head and said detection apparatus move from when a dischargenozzle discharges one droplet to when said discharge nozzle dischargesthe next droplet, settings are adjusted so as to satisfy the conditions

D/2+d/2≦L  (1),

and

H≦D  (2).

[0010] A second aspect of the present invention is a detecting methodfor a droplet discharge apparatus having a discharge head with aplurality of discharge nozzles for discharging droplets, has the stepsof emitting a detection light toward a predetermined receiver,discharging said droplets from said discharge nozzles at a predeterminedtime interval, detecting the amount of light received by said receiverdue to said droplets passing through the optical path of said detectionlight, and when verifying the discharge state of the discharge nozzlesbased on the detected result, adjusting settings so as to satisfy theconditions

D/2+d/2≦L, and H≦D,

[0011] where D is the diameter of the beam of said detection light, d isthe diameter of said droplets, L is the distance between the dischargenozzles in the direction of movement of said discharge head, and H isthe distance that said discharge head moves from when a discharge nozzledischarges one droplet to when said discharge nozzle discharges the nextdroplet.

[0012] Furthermore, a third aspect of the present invention is a dropletdischarge apparatus has a discharge head with a plurality of dischargenozzles for discharging droplets arranged side by side in apredetermined direction, a detection apparatus for detecting whethersaid droplets are discharged from said discharge nozzles, and a controlunit for performing predetermined processing for said discharge headbased on the detection result of said detection apparatus, wherein saiddetection apparatus has a light emitter for emitting a detection light,a receiver for receiving said detection light from said light emitter,and a moving device for moving said discharge head in a direction tointersect the optical path of said detection light, wherein said movingdevice moving said discharge head in said direction of movement, saiddischarge nozzle discharging said droplets at a predetermined timeinterval, and when D is the diameter of a beam of said detection light,d is the diameter of said droplets, L is the distance between thedischarge nozzles in the direction of movement of said discharge head,and H is the relative distance that said discharge head and saiddetection apparatus move from when a discharge nozzle discharges onedroplet to when said discharge nozzle discharges the next droplet,settings are adjusted so as to satisfy the conditions

D/2+d/2≦L, and H≦D.

[0013] A fourth aspect of the present invention is a droplet dischargemethod has a step for discharging droplets from a discharge head with aplurality of discharge nozzles for discharging droplets arranged side byside in a predetermined direction, a detection step for detectingwhether said droplets are discharged from said discharge nozzles, and aprocessing step for performing predetermined processing for saiddischarge head based on a detection result of said detection step,wherein said detection step has the steps of radiating a detection lighttoward a predetermined receiver, discharging said droplets from saiddischarge nozzles at a predetermined time interval, detecting the amountof light received in said receiver due to said droplets passing throughthe optical path of said detection light, and when verifying thedischarge state of the discharge nozzles based on the detected result,adjusting settings so as to satisfy the conditions

D/2+d/2≦L, and H≦D,

[0014] where D is the diameter of the beam of said detection light, d isthe diameter of said droplets, L is the distance between the dischargenozzles in the direction of movement of said discharge head, and H isthe distance that said discharge head moves from when a discharge nozzledischarges one droplet to when said discharge nozzle discharges the nextdroplet.

[0015] Furthermore, a fifth aspect of the present invention is a devicewherein at least one part thereof is formed by the above-describeddroplet discharge apparatus.

[0016] Moreover, a sixth aspect of the present invention is electronicequipment, wherein at least one part of a system component thereof isformed by the above-described droplet discharge apparatus.

[0017] According to the aspects described above, by optically detectingdroplets discharged from discharge nozzles in a state where theabove-described conditions are satisfied, it is possible to place onlyone droplet discharged from each discharge nozzle onto the optical pathof a detection light, so that it is possible to detect accuratelywhether droplets are discharged from the discharge nozzles normally.That is, in FIG. 5 and FIG. 6, if the condition of the above equation(1) is not satisfied a state occurs in which for example two dropletsdischarged from each of two discharge nozzles are placed on the opticalpath of the detection light. Then even in a state where no droplet isdischarged from the first discharge nozzle, and a droplet is dischargedonly from the second discharge nozzle, there is a case where thereceiver makes an incorrect determination that a droplet is dischargedfrom the first discharge nozzle, due to the existence of the dropletfrom the second discharge nozzle on the optical path of the detectionlight. Furthermore, even if the discharge nozzles perform normaldischarge operations, by the fact that the condition of the aboveequation (2) is not satisfied, the discharge head passes through theoptical path of the detection light while one discharge nozzledischarges a first droplet and a second droplet. Therefore there is adefect in that even though droplets are discharged normally, they arenot detected. However, by satisfying the above conditions, theoccurrence of this defect can be avoided.

[0018] Furthermore, in a detection apparatus of a droplet dischargeapparatus of the present invention, in a case where the diameter of thebeam of the detection light is greater than the diameter of ameasurement region of the receiver, it is desirable that D is thediameter of the measurement region. That is, in the case where thediameter of the beam of the detection light is the diameter of themeasurement region of the receiver or greater, when a droplet passesthrough part of the optical path of the detection light, if the partthrough which it passes is outside of the measurement region, thereceiver cannot detect that the droplet has passed. Therefore, in thecase where the diameter of the beam of the detection light is greaterthan the diameter of the measurement region of the receiver thatreceives the detection light, the diameter D is set to the diameter ofthe measurement region.

[0019] Moreover, a detection apparatus of a droplet discharge apparatusof the present invention may be provided with a control device forresetting at least one of the values of D, d and H.

[0020] Accordingly, in the case where the detection apparatus does notsatisfy the above conditions, the control device can satisfy the aboveconditions by adjusting D, d or H.

[0021] In a droplet discharge apparatus of the present invention, it isdesirable that the number of the discharge nozzles can be optionallyset. By so doing, it is possible to form a device pattern in a range ofsizes and shapes as desired. For example, it is possible to optionallyset the number of discharge nozzles to be used by a control unit forcontrolling the discharge operation of the discharge nozzles.

[0022] Here, the abovementioned droplet discharge apparatus is used formanufacturing devices based on the droplet discharge method, includingan ink jet device with an ink jet head. The ink jet head of the ink jetdevice is capable of discharging droplets material quantitatively by anink jet method, and it can drop liquid material of 1 to 300 nanogramsper dot, for example, continuously. The droplet discharge apparatus mayalso be a dispenser apparatus.

[0023] Liquid material (droplet) means a medium with a viscosity capableof being discharged (capable of dropping) from the discharge nozzle of adischarge head of a droplet discharge apparatus. It may be eitherwater-soluble or oil soluble. Any material that has a fluidity(viscosity) capable of being discharged from a discharge nozzle or thelike is acceptable, even if solid material is mixed in, provided it isessentially liquid. Furthermore, material contained in the liquidmaterial may be heated to its melting point or higher and melted, or maybe minute particles suspended in solvent. Moreover, the base materialonto which droplets are discharged refers to not only a flat substrate,but may also be a substrate with a curved surface. Furthermore, it isnot necessary for the pattern forming surface to be hard, and it may beany flexible surface such as a film, paper, rubber or the like, as wellas glass, plastic, and metal.

[0024] Moreover, when manufacturing a device by discharging droplets ofliquid material onto a base material from a discharge head of a dropletdischarge apparatus, the liquid material contains functional material.Functional material means device forming material that exhibits apredetermined function when placed on a base material (substrate).Functional materials include liquid crystal element forming material forforming liquid crystal devices (liquid crystal elements) including colorfilters, organic EL element forming material for forming organic EL(electroluminescent) devices (organic EL elements), wire pattern formingmaterial including metal for forming wire patterns to distributeelectric power, and the like.

BRIEF DESCRIPTION OF THE DRAWINGS

[0025]FIG. 1 is a schematic perspective view showing an embodiment of adroplet discharge apparatus incorporating a detection apparatus of thepresent invention.

[0026]FIG. 2 shows a discharge head. FIG. 3 shows the discharge head.

[0027]FIG. 4 is a schematic perspective view showing an embodiment ofthe detection apparatus.

[0028]FIG. 5 is a schematic diagram showing how droplets discharged froma discharge head pass through the optical path of a detection light ofthe detection apparatus.

[0029]FIG. 6 is a schematic diagram to describe the distance that thedischarge head moves from when a discharge nozzle discharges one dropletto when it discharges the next droplet.

[0030]FIG. 7 is a schematic diagram showing an example of a detectionoperation in a case where the diameter of the beam of a detection lightis larger than the measuring region of a receiver.

[0031]FIG. 8A to FIG. 8F show a manufacturing process for a color filteras an example of a device.

[0032]FIG. 9 is a sectional side elevation of an organic EL device.

[0033]FIG. 10 is an exploded perspective view of a plasma display.

[0034]FIG. 11 is a flow chart for explaining a pattern forming method.

[0035]FIG. 12A and FIG. 12B are schematic diagrams showing an example ofa pattern forming method.

[0036]FIG. 13A and FIG. 13B are schematic diagrams showing an example ofa pattern forming method.

[0037]FIG. 14A and FIG. 14B are schematic diagrams showing an example ofa pattern forming method.

[0038]FIG. 15A to FIG. 15D are diagrams for describing a process of amicro lens manufacturing method.

[0039]FIG. 16A and FIG. 16B are schematic diagrams of an electron sourcesubstrate of an image display device.

[0040]FIG. 17A to FIG. 17C are diagrams for explaining the manufacturingprocess of the image display device.

[0041]FIG. 18A to FIG. 18C are diagrams showing examples of electronicequipment in which these devices are installed.

DETAILED DESCRIPTION OF THE INVENTION

[0042] Hereunder is a description of a droplet discharge apparatushaving a detection apparatus of the present invention, with reference tothe figures.

[0043]FIG. 1 is a schematic perspective view showing an embodiment of adroplet discharge apparatus incorporating a detection apparatus of thepresent invention.

[0044] In FIG. 1, a droplet discharge apparatus IJ is provided with; adischarge head 1 for discharging droplets, being liquid material, astage device 2 for supporting a substrate P, being a base material formanufacturing a device, a carrier device 3 for carrying the substrate Pto and from (loading and unloading) the stage device 2, and a controlunit CONT for control of the overall operation of the droplet dischargeapparatus IJ including the discharge operation of the discharge head 1.In the present embodiment, the carrier device 3 has a robot arm, and isarranged in the −X direction in the figure, of the stage device 2. Thedischarge head 1 has a plurality of discharge nozzles 11 (refer to FIG.2) on its discharge surface 1P, which discharge droplets of liquidmaterial. In the present embodiment, the plurality of discharge nozzles11 is arranged in at least the X axis direction (predetermineddirection) on the discharge surface 1P of the discharge head 1. Theliquid material is stored in a storage unit (tank), which is not shownin the figure, and is discharged from the discharge head 1 via tubes.The droplet discharge apparatus IJ places liquid material onto thesurface of the substrate P from the discharge head 1 to depositfunctional material contained in the liquid material. The discharge head1 is capable of being moved in the XY directions (horizontal directions)in the figure by a moving device 4, and is also capable of moving in theZ direction (vertical direction). Furthermore, the discharge head 1 iscapable of moving in the θX direction (rotating around the X axis), θYdirection (rotating around the Y axis), and θZ direction (rotatingaround the Z axis). The stage device 2 is capable of being moved in theX and Y directions by a driving device 5, and is also capable of movingin the Z direction and the OZ direction. The stage device 2 supportingthe substrate P is capable of being moved relative to the discharge head1 by the moving device 4 and the driving device 5.

[0045] A cleaning unit 6 for cleaning the discharge head 1 and a cappingunit 7 for capping the discharge head 1 are provided at a separatelocation from the stage device 2, that is, a separate location from thelocation where droplets are discharged by the discharge head 1 formanufacturing devices. In the present embodiment, the cleaning unit 6and the capping unit 7 are provided in the +Y direction of the stagedevice 2. The cleaning unit 6 cleans the discharge nozzles 11 of thedischarge head 1. When cleaning, the discharge head 1 is firstpositioned relative to the cleaning unit 6, and the cleaning unit 6 andthe discharge surface 1P of the discharge head 1 are connected. Next,the cleaning unit 6 draws air out from the space formed between thecleaning unit 6 and the discharge surface 1P of the discharge head 1. Bythe space being evacuated, liquid material present in the dischargenozzles 11 of the discharge head 1 is sucked out, thus the dischargehead 1 and the discharge nozzles 11 are cleaned. Furthermore, thecapping unit 7 prevents the discharge surface 1P of the discharge head 1from drying out, and caps the discharge surface 1P during stand-by timein which no device is manufactured.

[0046]FIG. 2 is an exploded perspective view of the discharge head 1,and FIG. 3 is a partially sectioned perspective view of the dischargehead 1. As shown in FIG. 2, the discharge head 1 has a nozzle plate 10with discharge nozzles 11, a pressure chamber substrate 13 with adiaphragm 12, and a case 14, in which the nozzle plate 10 and thediaphragm 12 are fitted and supported. As shown in FIG. 3, the main partof the discharge head 1 has a structure whereby the pressure chambersubstrate 13 is sandwiched between the nozzle plate 10 and the diaphragm12. The pressure chamber substrate 13 is formed from a siliconmonocrystal substrate or the like, and has a plurality of cavities(pressure chambers) 16 formed by etching. The discharge nozzles 11 areformed at locations in the nozzle plate 10 corresponding to the cavities16 when the nozzle plate 10 and the pressure chamber substrate 13 arebonded together.

[0047] Side walls 17 separate the plurality of cavities 16. Each of thecavities 16 is linked to a reservoir 15, being a common flow path, via asupply port 18. The diaphragm 12 is formed for example from a thermallyoxidized film or the like. The diaphragm 12 has a tank aperture 19, andliquid material is supplied from the tank aperture 19 via a tubeconnected to the tank. Piezoelectric elements 20 are provided atlocations corresponding to the cavities 16 in the diaphragm 12. Each ofthe piezoelectric elements 20 has a structure in which piezoelectricceramic crystals such as PZT elements or the like are sandwiched betweena top electrode and a bottom electrode (not shown in the figure). Thepiezoelectric elements 20 are deformed in accordance with an appliedvoltage.

[0048] Referring back to FIG. 1, the droplet discharge apparatus IJ isprovided with a detection apparatus 30 that detects whether droplets ofliquid material are discharged from the discharge nozzles 11 of thedischarge head 1. The detection apparatus 30 is provided at a separatelocation from the stage device 2, that is, at a separate location fromthe location where the droplet discharge operation is performed by thedischarge head 1 for manufacturing devices. In the present embodiment,it is provided in the +X direction from the stage device 2. Thedetection apparatus 30 detects a discharge nozzle (non-performingnozzle) that cannot discharge droplets due to clogging or the like, bydetecting whether a droplet of liquid material is discharged from eachof the plurality of discharge nozzles 11 installed in the discharge head1. As a result, it is possible to detect whether a dot is missing fromthe substrate P when forming a dot pattern on the substrate bydischarging droplets onto the substrate P.

[0049] The detection apparatus 30 is provided with a light emitter 31for emitting detection light, and a receiver 32 capable of receivingdetection light emitted from the light emitter 31. The light emitter 31comprises a laser beam emitting device that emits a laser beam of apredetermined diameter. Furthermore, the droplet discharge apparatus IJis provided with a display unit 40 that displays information related todetection results and detection conditions of the detection apparatus30. The display unit 40 comprises for example a liquid crystal display,a CRT, or the like.

[0050]FIG. 4 is a schematic perspective view of the detection apparatus30 with the light emitter 31 and the receiver 32. As shown in FIG. 4,the light emitter 31 and the receiver 32 are arranged opposite eachother. In the present embodiment, the light emitter 31 emits a laserbeam, being a detection light, in the Y axis direction. The beam of thedetection light is set to a diameter D, and the detection light emittedfrom the light emitter 31 travels straight toward the receiver 32. Thedischarge head 1 discharges droplets from above the light path of thedetection light (on the +Z side), while being moved by drive of themoving device 4 in a direction (the X axis direction) that intersectsthe light path direction (the Y axis direction) of the detection lightat a constant speed. The arrangement is such that droplets aredischarged from the discharge nozzles 11 of the discharge head 1 at adetermined time interval, and the droplets discharged from the dischargenozzles 11 pass through the optical path of the detection light.

[0051]FIG. 5 is a schematic diagram showing how droplets discharged fromthe discharge nozzles 11 of the discharge head 1 pass through theoptical path of a detection light. The discharge head 1 shown in FIG. 5has discharge nozzles 11A, 11B and 11C, which are aligned in the X axisdirection, being the direction of movement. However, the number ofdischarge nozzles 11 arranged in the discharge head 1 can be optionallyset.

[0052] As shown in FIG. 5, the discharge head 1 discharges droplets fromeach of the discharge nozzles 11A to 11C while moving in the X axisdirection at a constant speed. The alignment of the discharge nozzles11A to 11C, and the direction of movement of the discharge head 1 arethe same. Droplets are discharged from each of the discharge nozzles 11Ato 11C at the same time. Furthermore, each of the discharge nozzles 11Ato 11C discharges a droplet at a constant time interval. The dischargeddroplets pass through the optical path of the detection light, being alight beam. Droplets pass through the optical path of the detectionlight, and the droplets are arranged on the optical path of thisdetection light, thus the intensity of detection light received by thereceiver 32 changes relative to the intensity of light received in asituation where there is no droplet placed on the light path of thedetection light. That is, by placing droplets on the light path of thedetection light, the intensity of light received in the receiver 32falls compared with the case where no droplet is placed on the lightpath of the detection light. The received light result (received lightsignal) of the receiver 32 is output to the control unit CONT. Thecontrol unit CONT can determine whether there is a droplet dischargedfrom a discharge nozzle 11 or not, based on the change (fall) in theintensity of the detection light received in the receiver 32, caused bya droplet passing through the optical path of the detection light.

[0053] To be specific, when a droplet is placed on the optical path ofthe detection light, the output signal (output voltage) of the receiver32 changes when the intensity of light received in the receiver 32falls. The receiver 32 outputs either one of a binary “HIGH” or “LOW”signal based on this output voltage to the control unit CONT. Here, forexample, the receiver 32 may output a “HIGH” signal in the case wheredroplets are situated on the optical path of the detection light, andoutput a “LOW” signal where droplets are not situated on the opticalpath of the detection light.

[0054] If D is the diameter of the beam of the detection light, d is thediameter of the droplets discharged from the discharge nozzle 11, L isthe distance between the discharge nozzles in the direction of movementof the discharge head 1, and H is the distance that the discharge head 1moves from when a discharge nozzle discharges a droplet to when itdischarges the next droplet, the detection apparatus 30 is set so as tosatisfy the conditions

D/2+d/2≦L  (1),

and

H≦D  (2).

[0055] The distance H, as in the schematic diagram shown in FIG. 6, isthe distance that the discharge head 1 moves from when a first dropletis discharged from, for example, a discharge nozzle 11B of the dischargehead 1, which moves at a constant speed, to when a second droplet, beingthe next droplet to the first droplet, is discharged after apredetermined time interval.

[0056] By satisfying the above conditions, only one droplet dischargedfrom the discharge nozzles 11 (11A to 11C) is placed on the optical pathof the detection light, so that it is possible to detect accuratelywhether droplets are discharged correctly from the discharge nozzles.That is, in the case where the condition of the above equation (1) isnot satisfied, a state occurs whereby two droplets discharged forexample from the discharge nozzle 11A and the discharge nozzle 11B, areplaced on the optical path of the detection light. Therefore, even in astate where the discharge nozzle 11A, which is not operating due toclogging or the like, does not discharge a droplet, and a droplet isdischarged only from the discharge nozzle 11B, since the receiver 32 isconstructed to output either one of the binary “HIGH” or “LOW” signals,it outputs a “HIGH” signal due to the droplet from the discharge nozzle11B being present on the optical path of the detection light, eventhough a droplet has not been discharged from the discharge nozzle 11A.Hence there is a problem in that the control unit CONT makes anincorrect determination that “a droplet is discharged from the dischargenozzle 11A. However, by satisfying the above equation (1), then in astate where for example a droplet from the discharge nozzle 11A passesthrough the optical path of the detection light, a droplet from thedischarge nozzle 11B passes outside the optical path of the detectionlight, so that the abovementioned problem can be avoided.

[0057] Furthermore, in the case where the above equation (2) is notsatisfied, even though for example the discharge nozzle 11B dischargesnormally at a predetermined time interval, a state occurs in FIG. 6where the first droplet passes outside in the −X direction of theoptical path of the detection light, and the second droplet also passesoutside in the +X direction of the detection light. That is, even thoughdroplets are discharged from the discharge nozzle 11B normally at apredetermined time interval, neither the first droplet nor the seconddroplet passes through the optical path of the detection light. In otherwords, the discharge nozzle 11B has already passed through the opticalpath of the detection light when the second droplet is discharged. Hencethere is a defect in that the receiver 32 cannot detect that dropletsare discharged. However, by satisfying the condition of the aboveequation (2), droplets discharged normally at a predetermined timeinterval pass through the optical path of the detection light, so thatthe abovementioned defect can be avoided.

[0058] Next is a description of a method of detecting whether dropletsare discharged from the discharge nozzles 11 (11A to 11C) using adetection apparatus 30 having the above-described construction.

[0059] Firstly, the control unit CONT moves the discharge head 1 bymeans of the moving device 4, to the location where the operation ofdetecting non-performing nozzles is carried out, that is, in thevicinity of the detection apparatus 30. The control unit CONT then emitsdetection light toward the receiver 32 from the light emitter 31, andmoves this discharge head 1 in a direction to intersect the optical pathof the detection light at a constant speed while matching the alignmentof the plurality of discharge nozzles 11A to 11C with the direction ofmovement of the discharge head 1, discharging droplets from each of thedischarge nozzles 11A to 111C at a constant time interval. An outputsignal from the receiver 32 is output to the control unit CONT, and thecontrol unit CONT processes the output signal from the receiver 32. Thecontrol unit CONT detects whether a droplet is being discharged fromeach of the discharge nozzles 11A to 11C, based on changes in theintensity of detection light received by the receiver 32 due to dropletspassing through the optical path of the detection light.

[0060] If the detection apparatus 30 determines that the conditions inthe above equations (1) and (2) are not satisfied, the control unit CONTadjusts at least one of the value of the diameter D of the beam of thedetection light, the diameter d of the droplet, and the distance H, inorder to satisfy the above conditions. In the case of changing thediameter D of the beam of the detection light, the control unit CONT canadjust the diameter D by, for example, placing an optical element (lensor pin hole) in the vicinity of the detection light emitting section ofthe light emitter 31 using a drive unit, which is not shown in thefigure. Furthermore, in the case of changing the diameter d of thedroplet, the control unit CONT can adjust the diameter d by, forexample, adjusting the oscillation amplitude of the piezoelectricelement 20 of the discharge head 1 (by adjusting the drive voltage ofthe discharge head 1) to control the amount discharged in one droplet.Moreover, in the case of changing the distance H, the control unit CONTcan adjust the distance H by, for example, adjusting the speed at whichthe discharge head 1 is moved by the moving device 4, or by adjustingthe time interval at which droplets are discharged from the dischargenozzles 11A to 11C.

[0061] If, based on the detection results from the detection apparatus30, it is determined that there is no non-performing nozzle that cannotdischarge droplets among the plurality of discharge nozzles 11A to 11C,the control unit CONT terminates the series of processing regarding thedetection of discharge nozzles, moves the discharge head 1 to the stagedevice 2 (the location where droplets are discharged for manufacturingdevices), and discharges droplets of liquid material from the dischargehead 1 onto the substrate P supported by the stage device 2. On theother hand, if it is determined that there is a non-performing nozzle,based on the detection results from the detection apparatus 30, thecontrol unit CONT cleans this discharge head 1 using for example thecleaning unit 6 as shown in FIG. 1.

[0062] As described above, by setting the conditions shown in the aboveequations (1) and (2) regarding a detection apparatus that detectsoptically whether a droplet is discharged from a discharge nozzle 11, itis possible to place only one droplet discharged from each of thedischarge nozzles 11A to 11C on the optical path of a detection light.Consequently, it is possible to detect correctly whether a droplet isdischarged normally from the discharge nozzles 11A to 11C.

[0063] In the above embodiment, the diameter D is the diameter of thebeam of a detection light. However, in the case where the diameter ofthe beam of the detection light is greater than or equal to the diameterof the circular measurement region, the diameter D of the aboveequations (1) and (2) denotes the diameter of the measurement region.That is, as shown in the schematic diagram in FIG. 7, in the case wherea diameter D1 of the beam of the detection light is greater than orequal to a diameter D2, being the measurement region of the receiver 32,then if a droplet passes through a region AR, being part of the opticalpath of the detection light, when the region AR passed through is aregion outside of the measurement region of the receiver 32, thereceiver 32 cannot detect the passing droplet. Therefore, in the casewhere the diameter D1 of the beam of a detection light is greater thanor equal to the diameter D2 of the measurement region, “diameter D inthe above conditional expression=diameter D2 of the measurement region”.On the other hand, in the case where the diameter D of the beam of adetection light is less than or equal to the diameter D2 of themeasurement region of the receiver 32, “diameter D in the aboveconditional expression=diameter D1 of the beam of the detection light”.

[0064]FIG. 1 shows only one discharge head 1 and the stage device 2.However, the droplet discharge apparatus IJ may comprise a plurality ofdischarge heads 1 and stage devices 2. In this case, droplets ofdifferent types or the same type of liquid material may be dischargedfrom the plurality of discharge heads 1. After a first liquid materialis discharged from a first discharge head of the plurality of dischargeheads 1 onto the substrate P, it is baked or dried, and then after asecond liquid material is discharged from a second discharge head ontothe substrate P, it is baked or dried. Hereunder, by performing the sameprocess using the plurality of discharge heads, a plurality of materiallayers is stacked on the substrate P to form a multilayer pattern.

[0065]FIG. 8 shows an example of a process for manufacturing devices bya droplet discharge apparatus IJ of the present invention, showing anexample of a process for manufacturing color filters of liquid crystaldevices.

[0066] Firstly, as shown in FIG. 8A, black matrices 52 are formed on onesurface of the transparent substrate P. For a method of forming theblack matrices 52, resin (preferably black) with no optical transparencyis coated at a prescribed thickness (for example, approximately 2 μm) bya method such as spin coating or the like. For minimum display elementssurrounded by the grid of black matrices 52, that is, filter elements53, for example the width in the X axis direction is approximately 30μm, and the length in the Y axis direction is approximately 100 μm.

[0067] Next, as shown in FIG. 8B, a liquid material (droplet) 54 for acolor filter is discharged from the discharge apparatus, and this landson the filter element 53. The amount of liquid material 54 dischargedshould be a sufficient amount considering the reduction in the volume ofliquid material during heating treatment.

[0068] When the droplets 54 fill all filter elements 53 on thesubstrates P in this manner, heating treatment is performed using aheater such that the substrate P reaches a prescribed temperature (forexample, approximately 70° C.). By this heating treatment, solventevaporates from the liquid material, so that the volume of the liquidmaterial is reduced. In the case where this volume reduction is extreme,the droplet discharge process and heating treatment are repeated until asufficient color filter film thickness is obtained. By this process,solvent contained in the liquid material evaporates, and only solids(functional material) contained in the liquid material remain to formthe final film, forming color filters 55 as shown in FIG. 8C.

[0069] Next as shown in FIG. 8D, in order to make the substrate Psmooth, and to protect the color filters 55, the color filters 55 andthe black matrices 52 are covered by forming a protective film 56 on thesubstrate P. When forming this protective film 56, a method such as spincoating, roll coating, ripping or the like can be used. However,similarly to the case of the color filters 55, it may also be formedusing the discharge apparatus.

[0070] Next as shown in FIG. 8E, a transparent conductive film 57 isformed over the whole surface of this protective film 56 using asputtering technique, a vacuum evaporation method or the like.Afterwards, the transparent conductive film 57 is patterned, and pixelelectrodes 58 are patterned corresponding to the filter elements 53. Ina case where TFTs (Thin Film Transistors) are used to drive a liquidcrystal display panel, this patterning is not required.

[0071] In such color filter manufacturing, since the discharge head 1 isused, it is possible to discharge color filter material continuouslywithout problems. Thus it is possible to form good color filters as wellas improving the productivity.

[0072] Before the above-described color filter manufacturing process, adetection process is performed to verify whether droplets are dischargedfrom the discharge nozzles 11 of the discharge head 1.

[0073] Furthermore, in the discharge apparatus, it is possible to formoptional system components of electro-optical devices by selectingappropriate liquid material. For example, by using for the liquid, arange of materials such as; material for forming organic EL elements,metal colloids which become material for metal wiring, or microlensmaterial, liquid crystal material and the like, it is possible to formvarious system components constituting electro-optical devices.Alternatively, it is also possible to form a SED (Surface-ConductionElectron-Emitter Display) as an electro-optical device.

[0074] Hereunder is a description of a manufacturing method for anelectro-optical device using the above-described droplet dischargeapparatus IJ.

[0075] Firstly, a manufacturing method for an organic EL device will bedescribed as an example of forming a system component of anelectro-optical device.

[0076]FIG. 9 is a sectional side elevation of an organic EL device whichconstitutes part of a system component manufactured using the dischargeapparatus. Firstly, a structural outline of this organic EL device willbe described. The organic EL device formed here is an embodiment of anelectro-optical device of the present invention.

[0077] An organic EL device 301 as shown in FIG. 9 is one where anorganic EL element 302 comprising; a substrate 311, a circuit elementsection 321, pixel electrodes 331, bank sections 341, light emittingdiodes 351, a cathode 361 (counter electrode), and a sealing substrate371, is connected by the wiring of a flexible substrate (omitted fromthe figure) to a drive IC (omitted from the figure). The circuit elementsection 321 is formed on the substrate 311, and a plurality of pixelelectrodes 331 is arranged in a line on the circuit element section 321.The bank sections 341 are formed in a grid shape between the pixelelectrodes 331, and light emitting diodes 351 are formed in concaveapertures 344 formed by the bank sections 341. The cathode 361 is formedover the whole surface of the bank sections 341 and the light emittingdiodes 351, and the sealing substrate 371 is laminated onto the cathode361.

[0078] The manufacturing process for an organic EL device 301 containingthe organic EL element has a bank section forming process for formingthe bank sections 341, a plasma processing process for forming the lightemitting diodes 351 appropriately, a light emitting diode formingprocess for forming the light emitting diodes 351, a counter electrodeforming process for forming the cathode 361, and a sealing process forlaminating the sealing substrate 371 onto the cathode 361 for sealing.

[0079] The light emitting diode forming process forms the light emittingdiodes 351 by forming a hole injection layer 352 and a luminous layer353 in the concave apertures 344, namely on the pixel electrodes 331,and comprises a hole injection layer forming process and a luminouslayer forming process. The hole injection layer forming process has afirst discharge process for discharging a first component (droplet) toform the hole injection layer 352 on the pixel electrodes 331, and afirst drying process for drying the discharged first component to formthe hole injection layer 352. The luminous layer forming process has asecond discharge process for discharging a second component (droplet) toform the luminous layer 353 on the hole injection layer 352, and asecond drying process for drying the discharged second component to formthe luminous layer 353.

[0080] In this light emitting diode forming process, the dropletdischarge apparatus IJ is used in the first discharge process in thehole injection layer forming process, and the second discharge processin the luminous layer forming process.

[0081] In this organic EL device 301 also, by verifying the dischargeoperation of the discharge head 1 in advance prior to discharge forforming each system component, it is possible to discharge formingmaterial of the hole injection layer and forming material of theluminous layer from the discharge head 1 satisfactorily. Therefore, itis possible to improve the reliability of the organic EL device 301obtained.

[0082] Next is a description of a manufacturing method for a plasmadisplay as an example of forming a system component.

[0083]FIG. 10 is an exploded perspective view showing a plasma display,being a system component, parts of which, namely address electrodes 511and bus electrodes 512 a, are manufactured by the droplet dischargeapparatus IJ. In FIG. 10, reference numeral 500 denotes a plasmadisplay. This plasma display 500 basically comprises a glass substrate501, a glass substrate 502, and an electrical discharge display section510 formed therebetween.

[0084] The electrical discharge display section 510 is assembled with aplurality of electrical discharge chambers, which are arranged such thata set of three electrical discharge chambers 516 forms one pixel, beinga red electrical discharge chamber 516 (R), a green electrical dischargechamber 516 (G), and a blue electrical discharge chamber 516 (B).

[0085] The address electrodes 511 are formed in strips at apredetermined spacing on the surface of the (glass) substrate 501, and adielectric layer 519 is formed so as to cover the surfaces of theaddress electrodes 511 and the substrate 501. Furthermore, partitions515 are formed on the dielectric layer 519 between the addresselectrodes 511, parallel with the address electrodes 511. The partitions515 are also divided (omitted from the figure) at predeterminedlocations in their longitudinal direction, perpendicular to the addresselectrodes 511. Basically, rectangular regions are formed, divided byadjacent partitions on the left and right sides in the widthwisedirection of the address electrodes 511, and partitions arrangedperpendicular to the address electrodes 511, forming electricaldischarge chambers 516 corresponding to the rectangular regions, and aset of three rectangular regions constitutes one pixel. Furthermore,fluorescent substances 517 fill the rectangular regions divided by thepartitions 515. The fluorescent substances 517 fluoresce with any one ofred, green and blue emissions: a red fluorescent substance 517 (R) fillsthe bottom of the red electrical discharge chamber 516 (R), a greenfluorescent substance 517 (G) the bottom of the green electricaldischarge chamber 516 (G), and a blue fluorescent substance 517 (B) thebottom of the blue electrical discharge chamber 516 (B).

[0086] Next, transparent display electrodes 512 formed from a pluralityof ITOs are formed on the glass substrates 502 in strips at apredetermined spacing, perpendicular to the address electrodes 511, andthe bus electrodes 512 a are formed from metal in order to compensatefor the high resistance ITO. Furthermore, a dielectric layer 513 isformed over them, and a protective film 514 is formed from MgO.

[0087] The two substrates, the substrate 501 and the glass substrate502, are then glued facing each other such that the address electrodes511 and the display electrodes 512 cross perpendicular to each other,and the electrical discharge chambers 516 are formed by evacuating theair enclosed by the substrate 501 and the partitions 515, and theprotective film 514 formed on the glass substrate 502 side, and thenintroducing rare gas. The display electrodes 512 formed on the glasssubstrate 502 side are formed in an arrangement such that there are twoof them to each electrical discharge chamber 516.

[0088] The address electrodes 511 and the display electrodes 512 areconnected to AC power, which is not shown in the figure, and by passingan electric current between the electrodes, it is possible to causeexcitation-emission from the fluorescent substances 517 for colordisplay at a required location in the electrical discharge displaysection 510.

[0089] In the present example, especially the address electrodes 511,the bus electrodes 512 a and the fluorescent substances 517 are formedusing the droplet discharge apparatus IJ. That is, especially because ofthe advantage in patterning, the address electrodes 511 and the buselectrodes 512 a are formed by discharging liquid material (droplet)consisting of a dispersion of metal colloid material (for example, goldcolloid and silver colloid) and conductive particles (for example, metalmicroparticles), and then drying and baking this. Furthermore, thefluorescent substances 517 are also formed by discharging liquidmaterial (droplet) in which a fluorescent substance is held in solutionor dispersed in a dispersion medium, and then drying and baking this.

[0090] In manufacturing this plasma display 500, prior to the dischargefor forming the address electrodes 511, the bus electrodes 512 a, andthe fluorescent substances 517, by verifying the discharge operation ofthe discharge head 1 in advance, it is possible to discharge both thematerial (liquid material) for forming the electrodes 511 and 512 a, andthe material (liquid material) for forming the fluorescent substances517, satisfactorily. Therefore, it is possible to improve thereliability of the plasma display 500 obtained.

[0091] Next is a description of a method of forming a conductive filmwiring pattern (metal wiring pattern) as an example of forming theabove-described system components.

[0092]FIG. 11 is a flow chart showing an example of a method of forminga conductive film wiring pattern.

[0093] In FIG. 11, the method of forming a pattern according to thepresent example has a step (step 11) for cleaning a substrate on whichdroplets of liquid material (droplet) are to be placed using apredetermined solvent or the like, a liquid repellency treatment step(step S2) which comprises part of a substrate surface processing step, aliquid repellency control processing step (step S3), which comprisespart of a surface processing step, for adjusting the liquid sputteringof a substrate surface in which a liquid sputtering process is applied,a material placement step (step S4) for placing droplets of liquidmaterial containing conductive film wiring forming material on thesurface treated substrate, based on the droplet discharge method to draw(form) a film pattern, an intermediate drying treatment step (step S5)containing thermal and optical treatment which removes at least part ofthe solvent component of the liquid material placed on the substrate,and a baking step (step S7) for baking the substrate on which apredetermined pattern is drawn. After the intermediate drying treatmentstep, it is determined whether the predetermined pattern drawing iscompleted (step S6), and if the pattern drawing is completed, the bakingstep is performed. However, if the pattern drawing is not completed, thematerial placement step is performed.

[0094] Next is a description of the material placement step (step S4)based on a droplet discharge method by means of the droplet dischargeapparatus IJ.

[0095] The material placement step of the present example is a step forforming a plurality of line shaped film patterns (wiring patterns) sideby side on the substrate P by placing droplets of liquid materialcontaining conductive wire forming material on the substrate P from thedroplet discharge head 1 of the droplet discharge apparatus IJ. Theliquid material is a liquid in which conductive particles of metal orthe like, being conductive wire film forming material, are dispersed ina dispersion medium. In the following description, a case is describedin which first, second and third film patterns (line patterns), W1, W2and W3 are formed on the substrate P.

[0096]FIG. 12, FIG. 13 and FIG. 14 are diagrams to describe an exampleof the order of arranging droplets on the substrate P in the presentexample. In the figures, a bitmap of pixels, being a plurality of gridshaped unit regions, where droplets of liquid material are placed, isarranged on the substrate P. Here, each square represents one pixel.First, second, and third pattern forming regions R1, R2 and R3, whichform the first, second and third film patterns W1, W2 and W3, arearranged so as to correspond to predetermined pixels among the pluralityof pixels. The plurality of pattern forming regions R1, R2 and R3 isarranged side by side in the X axis direction. In FIG. 12 to FIG. 14,the pattern forming regions R1, R2 and R3 are the hatched regions.

[0097] Furthermore, the arrangement is such that droplets of liquidmaterial discharged from the first discharge nozzle 11A of the pluralityof discharge nozzles provided on the discharge head 1 of the dropletdischarge apparatus IJ are placed on the first pattern forming region R1on the substrate P. Similarly, the arrangement is such that droplets ofliquid material discharged from the second and third discharge nozzles11B and 11C of the plurality of discharge nozzles provided on thedischarge head 1 of the droplet discharge apparatus IJ are placed on thesecond and third pattern forming regions R2 and R3 on the substrate Prespectively. That is, the discharge nozzles 11A, 11B and 11C arearranged so as to correspond to the first, second and third patternforming regions R1, R2 and R3 respectively. The discharge head 1 placesa plurality of droplets onto a plurality of pixels in the arrangedplurality of pattern forming regions R1, R2 and R3 sequentially.

[0098] Moreover, the arrangement is such that in the first, second andthird pattern forming regions R1, R2 and R3, the first, second and thirdfilm patterns W1, W2 and W3 to be formed in the pattern forming regionsR1, R2 and R3 are formed starting with a first side pattern Wa on oneside (−X side) in the line width direction, then a second side patternWb on the other side (+X side), and after forming the first and secondside patterns Wa and Wb, a central pattern Wc.

[0099] In the present example, the film patterns (line patterns) W1 toW3, and the pattern forming regions R1 to R3, each have the same linewidth L, and this line width L is set to be the size of three pixels.Furthermore, the spacing between patterns is set to be the same width S,and this width 1 is also set to be the size of three pixels. The nozzlepitch, being the spacing between the discharge nozzles 11A to 11C, isset to be the size of six pixels.

[0100] In the following description, the discharge head 1 with dischargenozzles 11A, 11B and 11C discharges droplets while scanning thesubstrate P in the Y axis direction. In the description using FIG. 12 toFIG. 14, a droplet placed during a first scan is designated “1”, anddroplets placed during second, third, . . . , n^(th) scans aredesignated “2”, “3”, . . . , “n” respectively.

[0101] As shown in FIG. 12A, in the first scan, droplets are placed fromthe first, second and third discharge nozzles 11A, 11B and 11C at thesame time in the predetermined first side pattern forming regions inorder to form the first side patterns Wa on the first, second and thirdpattern forming regions R1, R2 and R3, with a one pixel gap betweendroplets. When droplets are discharged from the discharge nozzles 11A,11B and 11C, the discharge operation of the discharge head 1 is verifiedin advance prior to the discharge. Here, the droplets placed on thesubstrate P spread out over the substrate P when they reach thesubstrate P. That is, as shown by the circles in FIG. 12A, dropletslanding on the substrate P spread out to have a diameter C larger thanone pixel. Since the droplets are placed at a predetermined spacing (onepixel spacing) in the Y axis direction, the droplets on the substrate Pare placed so as not to overlap. By so doing, it is possible to avoidapplying excessive liquid material onto the substrate P in the Y axisdirection, thus preventing bulges from occurring.

[0102] In FIG. 12A, the droplets are arranged so as not to overlap eachother when placed on the substrate P. However, the arrangement may besuch that the droplets are overlapped slightly. Furthermore, thedroplets are placed with a one pixel gap between them. However, thedroplets may be placed with a gap of any desired number of two or morepixels. In this case, the number of scanning operations and placementoperations (discharge operations) of the discharge head 1 on thesubstrate P may be increased to fill in the droplets on the substrate.

[0103] Moreover, since the surface of the substrate P is treated to beliquid repellent as required by steps S2 and S3, excess spreading ofdroplets placed on the substrate P is suppressed. As a result, it ispossible to maintain a satisfactory pattern shape reliably, and it isalso easy to form thick films.

[0104]FIG. 12B is a schematic diagram when droplets are placed on thesubstrate P from the discharge head 1 in a second scan. In FIG. 12B,droplets placed during the second scan are designated “2”. During thesecond scan, droplets are placed by the discharge nozzles 11A, 11B and11C at the same time so as to interpose between the droplets “1” placedduring the first scan. The droplets from the first and second scans andplacement operations merge together to form first side patterns Wa inthe first, second and third pattern forming regions R1, R2 and R3. Here,the droplets “2” also spread out when they land on the substrate P, andparts of the droplets “2” and parts of the droplets “1” placed on thesubstrate P previously overlap. To be specific, parts of the droplets“2” overlap the droplets “1”. In addition, during the second scan, whendischarging droplets from the discharge nozzles 11A, 11B and 11C, thedischarge operation of the discharge head 1 can be verified in advanceprior to the discharge.

[0105] In order to remove the dispersion medium after placing thedroplets for forming the first side patterns Wa on the substrate P, itis possible to perform an intermediate drying process (step S5) asrequired. The intermediate drying process may be an optical processusing lamp anneal, as well as typical heating treatment using a heatingsystem such as a hot plate, an electric furnace, a hot gas generator, orthe like.

[0106] Next, the discharge head 1 and the substrate P move relative toeach other in the X axis direction by the size of two pixels. Here, thedischarge head 1 is stepped in the +X direction by two pixels withrespect to the substrate P. At the same time, the discharge nozzles 11A,11B and 11C move. Then, the discharge head 1 performs a third scan. As aresult, as shown in FIG. 13A, droplets “3” for forming second sidepatterns Wb, forming parts of the film patterns W1, W2 and W3, areplaced on the substrate P by the discharge nozzles 11A, 11B and 11C atthe same time with a gap from the first side patterns Wa in the X axisdirection. The droplets “3” are also placed with a gap of one pixel inthe Y axis direction. In addition, during the third scan, whendischarging droplets from the discharge nozzles 11A, 11B and 11C, thedischarge operation of the discharge head 1 can be verified in advanceprior to the discharge.

[0107]FIG. 13B is a schematic diagram when droplets are placed on thesubstrate P from the discharge head 1 in a fourth scan. In FIG. 13B,droplets placed during the fourth scan are designated “4”. During thefourth scan, droplets are placed by the discharge nozzles 11A, 11B and11C at the same time so as to interpose between the droplets “3” placedduring the third scan. The droplets from the third and fourth scans andplacement operations merge together to form second side patterns Wb inthe pattern forming regions R1, R2 and R3. Here, parts of the droplets“4”, and parts of the droplets “3” placed on the substrate P previouslyoverlap. To be specific, parts of the droplets “4” overlap the droplets“3”. In addition, during the fourth scan, when discharging droplets fromthe discharge nozzles 11A, 11B and 11C, the discharge operation of thedischarge head 1 can be verified in advance prior to the discharge.

[0108] Here also, in order to remove the dispersion medium after placingthe droplets for forming the second side patterns Wb on the substrate P,it is possible to perform an intermediate drying process as required.

[0109] Next, the discharge head 1 is stepped in the −X direction by onepixel with respect to the substrate P, and at the same time, thedischarge nozzles 11A, 11B and 11C move in the −X direction by onepixel. Then, the discharge head 1 performs a fifth scan. As a result, asshown in FIG. 14A, droplets “5” for forming central patterns Wc, formingparts of the film patterns W1, W2 and W3, are placed on the substrate atthe same time. Here, parts of the droplets “5” and parts of the droplets“1” and “3” placed on the substrate P previously overlap. To bespecific, parts of the droplets “5” overlap the droplets “1” and “3”. Inaddition, during the fifth scan, when discharging droplets from thedischarge nozzles 11A, 11B and 11C, the discharge operation of thedischarge head 1 can be verified in advance prior to the discharge.

[0110]FIG. 14B is a schematic diagram when droplets are placed on thesubstrate P from the discharge head 1 in a sixth scan. In FIG. 14B,droplets placed during the sixth scan are designated “6”. During thesixth scan, droplets are placed by the discharge nozzles 11A, 11B and11C at the same time so as to interpose between the droplets “5” placedduring the fifth scan. The droplets from the fifth and sixth scans andplacement operations merge together to form central side patterns Wc inthe pattern forming regions R1, R2 and R3. Here, parts of the droplets“6” and parts of the droplets “5” placed on the substrate P previouslyoverlap. To be specific, parts of the droplets “6” overlap the droplets“5”. Furthermore, parts of the droplets “6” overlap the droplets “2” and“4” placed on the substrate P previously. In addition, during the sixthscan, when discharging droplets from the discharge nozzles 11A, 11B and11C, the discharge operation of the discharge head 1 can be verified inadvance prior to the discharge.

[0111] As above, the film patterns W1, W2 and W3 are formed in thepattern forming regions R1, R2 and R3.

[0112] As described above, when placing a plurality of dropletssequentially in the pattern forming regions R1, R2 and R3 to form almostidentically shaped film patterns W1, W2 and W3, since the order ofplacing droplets in the plurality of pixels of the pattern formingregions R1, R2 and R3 is set to be the same, then even in the case wherethe droplets “1” to “6” are placed so as to overlap parts of each other,the shapes of the overlaps in the film patterns W1, W2 and W3 areidentical. Therefore, it is possible to make the appearance of the filmpatterns W1, W2 and W3 identical. Accordingly, it is possible to preventthe occurrence of unevenness in appearance between the film patterns W1,W2 and W3.

[0113] Moreover, since the placement order of droplets is the same inthe film patterns W1, W2 and W3, the arrangements of droplets(overlapping shapes among droplets) in the film patterns W1, W2 and W3are identical. Hence it is possible to prevent the occurrence ofunevenness in appearance.

[0114] Furthermore, since the overlapping states between the filmpatterns W1, W2 and W3 are set to be the same, it is possible to makethe film thickness distribution of the film patterns almost the same.Accordingly, in a case where this film pattern is a repeating patternthat repeats across the surface of the substrate, to be specific, in acase where a plurality of patterns is provided corresponding to pixelsin a display device, the pixels have the same film thicknessdistribution. Accordingly, it is possible for locations across thesurface of the substrate to exhibit the same functionality.

[0115] Moreover, since the droplets “5” and “6” for forming the centralpatterns Wc are placed after forming the first and second side patternsWa and Wb so as to fill up the spaces between them, it is possible toform the line width of the film patterns W1, W2 and W3 almost uniformly.That is, in a case where the droplets “1”, “2”, “3” and “4” for formingthe side patterns Wa and Wb are placed after forming the centralpatterns Wc on the substrate P, a phenomena occurs whereby thesedroplets are drawn toward the central patterns Wc formed on thesubstrate P previously. Therefore there is a case in which the linewidths of the film patterns W1, W2 and W3 are difficult to control.However, since the droplets “5” and “6” for forming central patterns Wcare placed after forming the side patterns Wa and Wb on the substrate Ppreviously, so as to fill up the spaces between them as in the presentembodiment, it is possible to control the line width of the filmpatterns W1, W2 and W3 accurately.

[0116] The side patterns Wa and Wb may be formed after forming thecentral patterns Wc. In this case, by using the same placement order ofdroplets for the film patterns W1, W2 and W3, it is possible to preventthe occurrence of differences in appearance.

[0117] When forming a conductive wire film pattern (metal wire pattern)in this way, by verifying the discharge operation of the discharge head1 in advance prior to discharge, droplets can be dischargedsatisfactorily. Thus it is possible to improve the reliability of theconductive wire pattern obtained.

[0118] Next is a description of a method of manufacturing a microlens asan example of forming a system component.

[0119] In the present example, as shown in FIG. 15A, a droplet 622 aformed from a light transmissive resin is applied by discharge onto asubstrate P from the discharge head 1 of the droplet discharge apparatusIJ. When the droplet 622 a is discharged from the discharge head 1, thedischarge operation of the discharge head 1 is verified in advance priorto the discharge.

[0120] In the case where the microlens to be obtained is used for anoptical film for a screen for example, the substrate P may be a lighttransmissive sheet or light transmissive film, formed from a celluloseresin such as cellulose acetate, propylcellulose, or the like, or atransparent resin (light transmissive resin) such as polyvinyl chloride,polyethylene, polypropylene, polyester, or the like. Furthermore, asubstrate formed from transparent material (light transmissive material)such as glass, polycarbonate, polyalylate, polyether sulphone, amorphouspolyolefin, polyethylene terephthalate, polymethyl methacrylate, or thelike, can also be used as a substrate.

[0121] A light transmissive resin may be an acrylic resin such aspolymethyl methacrylate, polyhydroxy ethyl methacrylate, poly cyclohexylmethacrylate, or the like, an allyl resin such as polydiethyleneglycolbis allyl carbonate, polycarbonate, or the like, or thermoplastic orthermosetting resin such as methacrylic resin, polyurethane resin,polyester resin, polyvinyl chloride resin, polyvinyl acetate resin,cellulose resin, polyamide resin, fluororesin, polypropylene resin, orpolystyrene resin. Either one of these types may be used, or a pluralityof these types may be mixed for use.

[0122] However, in the present example, specifically, a radiated lightirradiation curing type is used for the light transmissive resin. Thisradiated light irradiation curing type is a combination of a lighttransmissive resin and a photoinitiator such as biimidazole compound, orthe like, and the irradiation curing characteristic is obtained by thecombination with such a photoinitiator. Radiated light is a general namefor visible light, ultraviolet light, far ultraviolet light, X-rays, anelectron beam, and the like, and especially ultraviolet light is usedtypically.

[0123] Depending on the size of a desired single microlens, one or moredroplets 622 a of such irradiation curing type light transmissive resinare discharged onto a substrate P. Then, the light transmissive resin623 formed from the droplets 622 a becomes a convex shape (almosthemispherical) as shown in FIG. 15A due to its surface tension. In thismanner, a predetermined amount of light transmissive resin is applied bydischarge as a single microlens to be formed, and this coating processis repeated for the desired number of microlenses. Then a radiated lightsuch as ultraviolet light or the like is radiated onto the lighttransmissive resin 623 to cure it as shown in FIG. 15B to form ahardened body 623 a. Here, the capacity of the droplet 622 a dischargedfrom the discharge head 1 per drop depends on the discharge head 1 andthe ink material to be discharged. However, normally it is approximately1 pL to 20 pL.

[0124] Next, as shown in FIG. 15C, a desired number of droplets 622 b,in which a large number of minute light diffusible particles 626 isdispersed, is discharged from the discharge head 1, and adheres to thesurfaces of the hardened bodies 623 a. The minute light diffusibleparticles include minute particles of silica, alumina, titania, calciumcarbonate, aluminum hydroxide, acrylic resin, organic silicon resin,polystyrene, urea resin, formaldehyde condensation product, and thelike, and one or a plurality of these types is used. However, in orderfor the minute light diffusible particles 626 to exhibit sufficientlight diffusivity, in the case where the minute particles are opticallytransparent, it is necessary to have a sufficient difference betweentheir refractive index and the refractive index of the lighttransmissive resin mentioned previously. Accordingly, in the case wherethe minute light diffusible particles 626 are optically transparent,appropriate ones are selected for use based on the light transmissiveresin to be used so as to satisfy such a condition.

[0125] Such minute light diffusible particles 626 are prepared as an inkcapable of being discharged from the discharge head 1, by beingdispersed in an appropriate solvent (for example, a solvent used forlight transmissive resin) in advance. At this time, it is desirable thatdispersion of the minute light diffusible particles 626 in the solventis improved by coating the surface of the minute light diffusibleparticles 626 with a surface active agent, or by coating them with amolten resin. By performing such treatment, it is possible to addflowability to the minute light diffusible particles 626, which aidsgood discharge from the discharge head 1. As a surface active agent forthe surface treatment, one such as cationic system, an anionic system, anonionic system, anamphoteric, a silicon system, a fluororesin system orthe like, is appropriately selected for use based on the type of minutelight diffusible particles 624.

[0126] Furthermore, it is desirable to use minute light diffusibleparticles 626 with a particle size of greater than or equal to 200 nmand less than or equal to 500 nm. This is because in such a range, theoptical transparency can be maintained satisfactorily by a particle sizeof 200 nm or greater, and it can be discharged from nozzles of thedischarge head 1 satisfactorily by being 500 nm or less.

[0127] The same discharge head 1 as the one that discharges the droplet622 a of light transmissive resin may be used to discharge the droplets622 b in which minute light diffusible particles 626 are dispersed, or adifferent one may be used. In the case where the same one is used, it ispossible to simplify the construction of the apparatus containing thedischarge head 1. On the other hand, in the case where a different oneis used, since each ink (ink formed from light transmissive resin andink formed from minute light diffusible particles 624) uses its ownhead, it is not necessary to clean the heads or the like when changingthe inks to be coated, thus enabling the productivity to be improved.

[0128] Afterwards, by performing heating treatment, decompressiontreatment, or heat and decompression treatment, the solvent in a droplet622 b, in which minute light diffusible particles 624 are dispersed, isevaporated. By so doing, the surface of the hardened body 623 a issoftened by the solvent in the droplet 622 b, and since the minute lightdiffusible particles 626 are adhered to this, the minute lightdiffusible particles 624 are fixed onto the surface of the hardened body623 a of light transmissive resin as the solvent evaporates and thesurface of the hardened body 623 a is hardened again. By fixing theminute light diffusible particles 624 onto the surface of the hardenedbody 623 a in this manner, it is possible to obtain a microlens 625 ofthe present invention, formed by dispersing the minute light diffusibleparticles 624 on the surface as shown in FIG. 15D.

[0129] In such a method of manufacturing a microlens 625, it is alsopossible to discharge the droplets 622 a and 622 b satisfactorily byverifying the discharge operation of the discharge head 1 in advance,prior to the discharge. Accordingly, it is possible to improve thereliability of the microlens 625 obtained.

[0130] Furthermore, since the convex shape (almost hemispherical)microlens 625 is formed from the light transmissive resin 623 and theminute light diffusible particles 624 using an ink jet method, noforming mold is required as in the case of using a metal pattern moldingprocess or an injection molding process, and there is also less loss ofmaterial. Accordingly, it is possible to achieve a reduction in themanufacturing cost. Moreover, since the microlens to be obtained is aconvex shape (almost hemispherical), by using this microlens it ispossible to disperse light almost evenly over a wide angle range(direction) of 360° for example. Furthermore, since minute lightdiffusible particles 626 are incorporated, it is possible to obtain amicrolens with high diffusivity.

[0131] Next is a description of a method of manufacturing an imagedisplay device with an electron emitting element as an example offorming a system component.

[0132] A substrate 70A as shown in FIG. 16A and FIG. 16B is to be madeinto an electron source substrate 70B of an image display device inwhich some of the system components are formed by a process using theabove-described droplet discharge apparatus IJ. The substrate 70A has aplurality of discharge target sections 78, arranged in a matrix.

[0133] To be specific, the substrate 70A has a substrate 72, a sodiumdiffusion prevention layer 74, a plurality of device electrodes 76A and76B, a plurality of metal wires 79A located on the plurality of deviceelectrodes 76A, and a plurality of metal wires 79B located on theplurality of device electrodes 76B. The shapes of each of the pluralityof metal wires 79A extend in the Y axis direction. The shapes of each ofthe plurality of metal wires 79B extend in the X axis direction. Sinceinsulating films 75 are formed between the metal wires 79A and the metalwires 79B, the metal wires 79A and the metal wires 79B are electricallyinsulated.

[0134] Parts containing a pair of a device electrode 76A and a deviceelectrode 76B correspond to one pixel region. The device electrode 76Aand device electrode 76B in a pair oppose each other on the sodiumdiffusion prevention layer 74, with a predetermined distancetherebetween. A device electrode 76A corresponding to a particular pixelregion is connected electrically with a corresponding metal wire 79A.Furthermore, a device electrode 76B corresponding to the pixel region isconnected electrically with a corresponding metal wire 79B. In thepresent specification, the part comprising the combination of thesubstrate 72 and the sodium diffusion prevention layer 74 may bedesignated a support substrate.

[0135] In each of the pixel regions of the substrate 70A, part of thedevice electrode 76A, part of the device electrode 76B, and the sodiumdiffusion prevention layer 74 exposed between the device electrode 76Aand the device electrode 76B correspond to a discharge target section78. To be more specific, the discharge target section 78 is a regionwhere a conductive thin film 41° F. (refer to FIG. 17B) is to be formed,and the conductive thin film 411F is formed such that it covers part ofthe device electrode 76A, part of the device electrode 76A, and the gapbetween the device electrodes 76A and 76B. As shown by broken lines inFIG. 16B, the discharge target section 78 in the present example iscircular.

[0136] The substrate 70A shown in FIG. 16B is positioned parallel to animaginary plane defined by the X axis direction and the Y axisdirection. The line writing direction and the columnwise direction ofthe matrices formed by a plurality of discharge target sections 78 areparallel to the X axis direction and the Y axis direction respectively.In the substrate 70A, the discharge target sections 78 are arranged sideby side at intervals in this order in the X axis direction. Furthermore,the discharge target sections 78 are arranged side by side at apredetermined spacing in the Y axis direction.

[0137] The spacing LX between the discharge target sections 78 in the Xaxis direction is approximately 190 μm. The spacing between thedischarge target sections 78 and the above-described size of thedischarge target section correspond to the spacing between pixel regionsin an approximately 40 inch high-vision television.

[0138] The droplet discharge apparatus IJ discharges conductive thinfilm material 411 as liquid material (droplet) onto each of thedischarge target sections 78 of the substrate 70A in FIG. 16A and FIG.16B. An organic palladium solution is used for this conductive thin filmmaterial 411, for example.

[0139] In order to manufacture an image display device using the dropletdischarge apparatus IJ, firstly, the sodium diffusion prevention layer74 whose main component is silicon dioxide (SiO₂) is formed on thesubstrate 72 formed from soda glass. To be specific, the sodiumdiffusion prevention layer 74 is obtained by forming a 1 μm thick SiO₂film on the substrate 72 using a sputtering technique. Next, a titaniumlayer with a thickness of 5 nm is formed on the sodium diffusionprevention layer 74 by a sputtering technique or a vacuum evaporationmethod. Then, a plurality of pairs of device electrodes 76A and deviceelectrodes 76B is formed from the titanium layer, with a predetermineddistance therebetween, using a photolithographic technique and anetching method. Afterwards, a plurality of metal wires 79A extending inthe Y axis direction is formed by coating and then baking silver (Ag)paste onto the sodium diffusion prevention layer 74 and the plurality ofdevice electrodes 76A using a screen printing technique. Next, aninsulating film 75 is formed by coating and baking a glass paste onto apart of each of the metal wires 79A using a screen printing technique.Then, a plurality of metal wires 79B extending in the X axis directionis formed by coating and baking Ag paste onto the sodium diffusionprevention layer 74 and the plurality of device electrodes 76B using ascreen printing technique. In the case of manufacturing the metal wires79B, Ag paste is coated such that the metal wires 79B cross the metalwires 79A via the intervening insulating film 75. The substrate 70A asshown in FIG. 16A and FIG. 16B is obtained using the process describedabove.

[0140] Next, the substrate 70A is made to be lyophilic by an oxygenplasma process under atmospheric pressure. This process makes part ofthe surface of the device electrodes 76A, part of the surface of thedevice electrodes 76B, and the surface of the exposed support substratebetween the device electrodes 76A and the device electrodes 76Blyophilic. Then, the surfaces become the discharge target sections 78.In addition, a surface that exhibits the desired lyophilic propertiescould be obtained without the above-described surface processing,depending on the material. In such a case, part of the surface of thedevice electrodes 76A, part of the surface of the device electrodes 76B,and the surface of the exposed support substrate between the deviceelectrodes 76A and the device electrodes 76B become the discharge targetsections 78 without performing the surface processing.

[0141] The substrate 70A on which the discharge target sections 78 areformed is carried to a stage of the droplet discharge apparatus IJ by acarrier device. Then, as shown in FIG. 17A, the droplet dischargeapparatus IJ discharges a conductive thin film material 411 from adischarge head 1 so as to form a conductive thin film 411F on thedischarge target sections 78. Here, when discharging the conductive thinfilm material 411, the discharge operation of the discharge head 1 isverified in advance prior to the discharge.

[0142] In the present example, discharge is performed from the dischargehead 1 such that the diameter of the droplets of the conductive thinfilm material 411 landing on the discharge target sections 78 are withina range of 60 μm to 80 μm. When a layer of a conductive thin filmmaterial 411 is formed on all the discharge target sections 78 of thesubstrate 70A, the carrier device places the substrate A in a dryingdevice. Then, a conductive thin film 411F, whose main component ispalladium oxide, is obtained on the discharge target sections 78 bydrying the conductive thin film material 411 on the discharge targetsections 78. In this manner, a conductive thin film 411F, which coverspart of the surface of the device electrodes 76A, part of the surface ofthe device electrodes 76B, and the surface of the exposed supportsubstrate between the device electrodes 76A and the device electrodes76B, is formed in each of the pixel regions.

[0143] Next, electron emission sections 411D are formed on part of theconductive thin film 411F by applying a predetermined, pulsed voltagebetween the device electrodes 76A and the device electrodes 76B. Here itis preferable to apply a voltage between the device electrodes 76A andthe device electrodes 76B under either an organic atmosphere or vacuumcondition. This is because it increases the electron emission efficiencyfrom the electron emission sections 411D. The device electrodes 76A, thecorresponding device electrodes 76B, and the conductive thin film 411Fwhich is provided with the electron emission sections 411D, are electronemission elements. Furthermore, each electron emission elementcorresponds to a pixel region.

[0144] The substrate 70A becomes an electron source substrate 70B by theabove process as shown in FIG. 17B.

[0145] Next, as shown in FIG. 17C, an image display device 70 isobtained by bonding the electron source substrate 70B and a frontsubstrate 70C by a known method. The front substrate 70C has a glasssubstrate 82, a plurality of fluorescent sections 84 positioned on theglass substrate 82 in a matrix pattern, and a metal plate 86 coveringthe plurality of fluorescent sections 84. The metal plate 86 functionsas an electrode to accelerate electron beams from the electron emissionsections 411D. The electron source substrate 70B and the front substrate70C are positioned such that each of the plurality of electron emissionelements faces one of the plurality of fluorescent sections 84.Furthermore, a vacuum condition is maintained between the electronsource substrate 70B and the front substrate 70C.

[0146] In a method of manufacturing such an image display device withelectron emission elements, it is also possible to discharge theconductive thin film material 411 satisfactorily by checking thedischarge operation of the discharge head 1 in advance prior to thedischarge. Thus it is possible to improve the reliability of the imagedisplay device obtained.

[0147] It is possible to manufacture electro-optical devices (devices)such as the above-described liquid crystal device, organic EL device andthe like using the droplet discharge apparatus IJ of the presentinvention. Hereunder is a description of applied examples of electronicequipment incorporating electro-optical devices, which are manufacturedby a device manufacturing apparatus IJ having a droplet dischargeapparatus.

[0148]FIG. 18A is a perspective view showing an example of a mobiletelephone. In FIG. 18A, numeral 1000 denotes a mobile telephone body,and numeral 1001 denotes a display panel in which the above-describedelectro-optical device is used. FIG. 18B is a perspective view showingan example of a watch type electronic equipment. In FIG. 18B, numeral1100 denotes a watch body, and numeral 1101 denotes a display panelusing the above-described electro-optical device. FIG. 18C is aperspective view showing an example of portable type informationprocessing equipment such as a word processor, a personal computer orthe like. In FIG. 18C, numeral 1200 denotes the information processingequipment, numeral 1202 an input section such as a keyboard, numeral1204 an information processing equipment body, and numeral 1206 adisplay panel using the above-described electro-optical device. Sincethe electronic equipment shown in FIG. 18A to FIG. 18C haveelectro-optical devices of the above-described embodiment, it ispossible to realize electronic equipment having display panels withexcellent display quality and bright screens.

[0149] In addition to the above examples, other examples are a liquidcrystal television, viewfinder type and monitor direct-view type videotape recorders, a car navigation system, a pager, an electronicnotebook, an electronic desk calculator, a word processor, aworkstation, a video telephone, a point-of-sale terminal, electronicpaper, equipment with a touch panel, and the like. An electro-opticaldevice of the present invention can be used as a display panel of suchelectronic equipment.

[0150] While preferred embodiments of the invention have been describedand illustrated above, it should be understood that these are exemplaryof the invention and are not to be considered as limiting. Additions,omissions, substitutions, and other modifications can be made withoutdeparting from the spirit or scope of the present invention.Accordingly, the invention is not to be considered as being limited bythe foregoing description, and is only limited by the scope of theappended claims.

What is claimed is:
 1. A detection apparatus for detecting a dropletdischarged from a discharge nozzle provided in a discharge head,comprising: a light emitter for emitting a detection light; a receiverfor receiving said detection light; and a moving device for moving saiddischarge head in a direction to intersect the optical path of saiddetection light, said moving device moving said discharge head in saiddirection of movement, said discharge nozzle discharging said dropletsat a predetermined time interval, and when D is the diameter of a beamof said detection light, d is the diameter of said droplets, L is thedistance between the discharge nozzles in the direction of movement ofsaid discharge head, and H is the relative distance that said dischargehead and said detection apparatus move from when a discharge nozzledischarges one droplet to when said discharge nozzle discharges the nextdroplet, settings are adjusted so as to satisfy the conditionsD/2+d/2≦L, and H≦D.
 2. A detection apparatus according to claim 1,wherein in a case where the diameter of the beam of said detection lightis greater than the diameter of a measurement region of said receiver, Dis the diameter of said measurement region.
 3. A detection apparatusaccording to claim 1, further comprising a control device for resettingat least one of the values of said D, d and H.
 4. A detection apparatusaccording to claim 1, wherein the number of said discharge nozzles canbe optionally set.
 5. A detecting method for a droplet dischargeapparatus having a discharge head with a plurality of discharge nozzlesfor discharging droplets, comprising the steps of: emitting a detectionlight toward a predetermined receiver; discharging said droplets fromsaid discharge nozzles at a predetermined time interval; detecting theamount of light received by said receiver due to said droplets passingthrough the optical path of said detection light, and when verifying thedischarge state of the discharge nozzles based on the detected result,adjusting settings so as to satisfy the conditions D/2+d/2≦L, and H<D,where D is the diameter of the beam of said detection light, d is thediameter of said droplets, L is the distance between the dischargenozzles in the direction of movement of said discharge head, and H isthe distance that said discharge head moves from when a discharge nozzledischarges one droplet to when said discharge nozzle discharges the nextdroplet.
 6. A droplet discharge apparatus comprising: a discharge headwith a plurality of discharge nozzles for discharging droplets arrangedside by side in a predetermined direction; a detection apparatus fordetecting whether said droplets are discharged from said dischargenozzles; and a control unit for performing predetermined processing forsaid discharge head based on the detection result of said detectionapparatus, wherein said detection apparatus comprising: a light emitterfor emitting a detection light; a receiver for receiving said detectionlight from said light emitter; and a moving device for moving saiddischarge head in a direction to intersect the optical path of saiddetection light, wherein said moving device moving said discharge headin said direction of movement, said discharge nozzle discharging saiddroplets at a predetermined time interval, and when D is the diameter ofa beam of said detection light, d is the diameter of said droplets, L isthe distance between the discharge nozzles in the direction of movementof said discharge head, and H is the relative distance that saiddischarge head and said detection apparatus move from when a dischargenozzle discharges one droplet to when said discharge nozzle dischargesthe next droplet, settings are adjusted so as to satisfy the conditionsD/2+d/2≦L, and H≦D.
 7. A droplet discharge apparatus according to claim6, wherein the number of said discharge nozzles can be optionally set.8. A droplet discharge method comprising: a step for dischargingdroplets from a discharge head with a plurality of discharge nozzles fordischarging droplets arranged side by side in a predetermined direction;a detection step for detecting whether said droplets are discharged fromsaid discharge nozzles; and a processing step for performingpredetermined processing for said discharge head based on a detectionresult of said detection step, wherein said detection step comprisingthe steps of: radiating a detection light toward a predeterminedreceiver; discharging said droplets from said discharge nozzles at apredetermined time interval; detecting the amount of light received insaid receiver due to said droplets passing through the optical path ofsaid detection light, and when verifying the discharge state of thedischarge nozzles based on the detected result, adjusting settings so asto satisfy the conditions D/2+d/2≦L, and H<D, where D is the diameter ofthe beam of said detection light, d is the diameter of said droplets, Lis the distance between the discharge nozzles in the direction ofmovement of said discharge head, and H is the distance that saiddischarge head moves from when a discharge nozzle discharges one dropletto when said discharge nozzle discharges the next droplet.
 9. A devicewherein at least one part thereof is formed by the droplet dischargeapparatus according to claim
 6. 10. Electronic equipment wherein atleast one part of a system component thereof is formed by the dropletdischarge apparatus according to claim 6.